Full Automatic Wafer Probing Machine AP3000 / AP3000e

AP3000/AP3000e are Accretech's next-generation ultra-high-performance probing machine designed to achieve high precision wafer probing at low vibration and low noise levels. Operating at +/- 0.8um and +/-1.5um overall precision (Accretech specified condition), both AP3000 / AP3000e are capable to process both 300mm or 200mm bare wafers according to customer's needs. 
Anti-Virus/Anti-Malware software is installed as standard software on the machine to protect against any virus penetration into the client's network. Compatibility with all major semiconductor tester's makes the platform the preferred wafer probing machine in the industry. 

• Needle cleaning Option (cleaning wafer or cleaning unit compatibility)

• Fan filter unit for mini-environment option available 

• HF jig/ hinge manipulator compatible for Tester interface

• Available in Single or Dual loader configuration with AMHS automation

• Head stage tilting option available  (Probe card tilt)

• Chuck: Ambient / Hot temp, up to 200C. / Low temp, down to -55C /Low noise

• APC : Auto probe card exchange

• Cassette ID reading

• Wafer ID reading (Top surface / Back surface)

• GP-IB Interface

• Prober Network (Veganet, Light-Veganet, Vega-Planet, GEM)

• PCAS (Probe card auto setup)

• Probe card PGV