Metrology

Opt-Scope Rex st400

3D white light Interference Microscope for Nano level surface roughness measuring.

  • Electric XY stage size up to 400 X 400 mm.
  • Compliant to ISO 25178-2 / JIS B 0681-2 on 3D Surface Texture Parameters.
  • Using Original Peak Detection Algorithm of interference (DEAP).
  • Continuous Measurement and Stitching Functions.
  • 6X High Speed Camera can be select (Optional)
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